Construction Work
Due to construction work, access to the electron microscope is severely restricted in June and July.
If you have any questions, please contact Stephan Puchegger.
Zeiss Supra 55 VP
Zeiss Supra 55 VP
The electron microscope Zeiss Supra 55 VP is an extraordinarily versatile instrument used to characterize the structure and composition of materials on the nanometer scale. The four available detectors (three of which are sensitive to secondary electrons, and one sensitive to back-scattered electrons) can be partly used under vacuum and partly in a low-pressure mode. The electron microscope is additionally equipped with three additional detectors built by Oxford Instruments. The EDX and the WDX detectors allow a precise element analysis of the samples. The electron microscope features a high current mode so that the sample current is adequate for the WDX measurements. An EBSD detector, which allows the examination of the crystallographic orientation of the samples, is also built into the microscope.
Person in charge
Please contact Stephan Puchegger if you need further information.
Specifications
| Resolution | 1.0 nm @ 15 kV |
|---|---|
| 1.7 nm @ 1 kV | |
| 3.5 nm @ 0.2 kV | |
| 2.0 nm @ 30 kV (VP mode) | |
| VP vacuum | 2–133 Pa, adjustable in 1 Pa steps |
| Magnification | 12–900,000× |
| Cathode | Field emission |
| Accelerating Voltage | 0.02–30 kV |
| Sample current | 4 pA–100 nA |
| Detectors | Inlense |
| Secondary electron | |
| VPSE | |
| 4Q–BSD | |
| EDX | |
| WDX | |
| EBSD | |
| Sample chamber | 330 mm (Ø) × 270 mm (h) |
| 1 EDS port 35° TOA | |
| CCD camera with IR illumination | |
| Sample stage | X = 130 mm |
| Y = 130 mm | |
| X/Y positioning accuracy = 2 um | |
| Z = 50 mm | |
| T = −3 bis 70° | |
| R = 360° (continuous) | |
| Micro sample stage | X = 20 mm |
| Y = 20 mm | |
| X/Y positioning accuracy = 100 nm | |
| Peltier module | Temperature range = −50 up to 100°C |