High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Author(s)

Lukas W. Perner, Gar-Wing Truong, David Follman, Maximilian Prinz, Georg Winkler, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Abstract

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Organisation(s)

Faculty Center for Nano Structure Research

External organisation(s)

Thorlabs Inc.

No. of pages

2

DOI

https://doi.org/10.1364/CLEO_SI.2023.SM4H.4

Publication date

2023

Peer reviewed

Yes

Austrian Fields of Science 2012

103021 Optics, 103040 Photonics, 104026 Spectroscopy, 103042 Electron microscopy

Keywords

ASJC Scopus subject areas

Spectroscopy, Atomic and Molecular Physics, and Optics

Portal url

https://ucris.univie.ac.at/portal/en/publications/highaccuracy-measurement-of-midir-refractive-indices-in-gaasalgaas-thinfilm-heterostructures(d330981d-cec2-473b-be60-e8a2e7d9bc53).html