High-Accuracy Measurement of Mid-IR Refractive Indices in GaAs/AlGaAs Thin-Film Heterostructures

Autor(en)

Lukas W. Perner, Gar-Wing Truong, David Follman, Maximilian Prinz, Georg Winkler, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Abstrakt

We report a method to simultaneously measure the refractive index of two materials in as-deposited heterostructures by analysis of FTIR spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Organisation(en)

Fakultätszentrum für Nanostrukturforschung

Externe Organisation(en)

Thorlabs Crystalline Solutions

Anzahl der Seiten

2

DOI

https://doi.org/10.1364/CLEO_SI.2023.SM4H.4

Publikationsdatum

2023

Peer-reviewed

Ja

ÖFOS 2012

103021 Optik, 103040 Photonik, 104026 Spektroskopie, 103042 Elektronenmikroskopie

Schlagwörter

ASJC Scopus Sachgebiete

Spectroscopy, Atomic and Molecular Physics, and Optics

Link zum Portal

https://ucris.univie.ac.at/portal/de/publications/highaccuracy-measurement-of-midir-refractive-indices-in-gaasalgaas-thinfilm-heterostructures(d330981d-cec2-473b-be60-e8a2e7d9bc53).html