Representing a new generation of low cost spectroscopic ellipsometers the SENpro features simple operation, measurement speed and combined data analysis of ellipsometric measurements at single or multiple angle of incidence in the spectral range of 370 nm to 1050 nm. It measures thickness, refractive index and extinction coefficient of single films and multilayer stacks. Reflection measurements can be carried out and combined with ellipsometric data.

A compensator is used to automatically correct for depolarization effects caused by non-uniform films and to determine the ellipsometric angle in the full range of 0° to 360°. The SENpro comes with the spectroscopic ellipsometer software SpectraRay/4 for system control and data analysis including modeling, simulation, fitting and presentation. Ready to use application files make the operation very easy even for beginners.