High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Autor(en)

Lukas W. Perner, Georg Winkler, Gar-Wing Truong, David Follman, Jakob Fellinger, Maximilian Prinz, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl

Abstrakt

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Organisation(en)

Fakultätszentrum für Nanostrukturforschung

Externe Organisation(en)

Thorlabs Crystalline Solutions

Anzahl der Seiten

3

DOI

https://doi.org/10.1364/OIC.2022.WA.5

Publikationsdatum

2022

Peer-reviewed

Ja

ÖFOS 2012

103021 Optik, 205002 Beschichtungstechnik, 103040 Photonik, 104026 Spektroskopie

Schlagwörter

ASJC Scopus Sachgebiete

Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films

Link zum Portal

https://ucrisportal.univie.ac.at/de/publications/7d401012-4c75-4b7d-820c-b11e9eb5be7f