Publikationen

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Autor(en)
Lukas W. Perner, Georg Winkler, Gar-Wing Truong, David Follman, Jakob Fellinger, Maximilian Prinz, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl
Abstrakt

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Organisation(en)
Fakultätszentrum für Nanostrukturforschung
Externe Organisation(en)
Thorlabs Crystalline Solutions
Anzahl der Seiten
3
DOI
https://doi.org/10.1364/OIC.2022.WA.5
Publikationsdatum
2022
Peer-reviewed
Ja
ÖFOS 2012
103021 Optik, 205002 Beschichtungstechnik, 103040 Photonik, 104026 Spektroskopie
Schlagwörter
ASJC Scopus Sachgebiete
Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films
Link zum Portal
https://ucris.univie.ac.at/portal/de/publications/highaccuracy-measurement-of-midir-refractive-indices-of-gaasalgaas-in-thinfilm-multilayers(7d401012-4c75-4b7d-820c-b11e9eb5be7f).html