Publications

High-Accuracy Measurement of Mid-IR Refractive Indices of GaAs/AlGaAs in Thin-Film Multilayers

Author(s)
Lukas W. Perner, Georg Winkler, Gar-Wing Truong, David Follman, Jakob Fellinger, Maximilian Prinz, Stephan Puchegger, Garrett D. Cole, Oliver H. Heckl
Abstract

We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.

Organisation(s)
Faculty Center for Nano Structure Research
External organisation(s)
Thorlabs Inc.
No. of pages
3
DOI
https://doi.org/10.1364/OIC.2022.WA.5
Publication date
2022
Peer reviewed
Yes
Austrian Fields of Science 2012
103021 Optics, 205002 Coating technology, 103040 Photonics, 104026 Spectroscopy
Keywords
ASJC Scopus subject areas
Atomic and Molecular Physics, and Optics, Surfaces, Coatings and Films
Portal url
https://ucris.univie.ac.at/portal/en/publications/highaccuracy-measurement-of-midir-refractive-indices-of-gaasalgaas-in-thinfilm-multilayers(7d401012-4c75-4b7d-820c-b11e9eb5be7f).html